Nano-structuring, surface and bulk modification with a focused helium ion beam
نویسندگان
چکیده
منابع مشابه
Nano-structuring, surface and bulk modification with a focused helium ion beam
We investigate the ability of a focused helium ion beam to selectively modify and mill materials. The sub nanometer probe size of the helium ion microscope used provides lateral control not previously available for helium ion irradiation experiments. At high incidence angles the helium ions were found to remove surface material from a silicon lamella leaving the subsurface structure intact for ...
متن کاملFocused Ion Beam Nano-structuring for Applications in Photonics
To date, nano-and micro-structuring has commonly been implemented by a combination of specifically optimized processes of electron-beam lithography and reactive ion etching, thus limiting the range of materials that can be structured to only a few. In this talk we will introduce focused ion beam (FIB) milling as an emerging technology that enables fast, reliable and well-controlled nanometer-si...
متن کاملFocused Ion Beam Nano-structuring of Bragg Gratings in Al2O3 Channel Waveguides
We report our recent results on an optimization study of focused ion beam (FIB) nano-structuring of Bragg gratings in Al2O3 channel waveguides. By optimizing FIB milling parameters such as ion current, dwell time, loop repetitions, scanning strategy, and applying a top metal layer for reducing charging effects and improving sidewall definition, reflection gratings with smooth and uniform sidewa...
متن کاملFocused ion beam nano-structuring of photonic Bragg gratings in Al2O3 waveguides
Focused ion beam (FIB) etching is receiving increasing attention for the fabrication of active integrated optical components such as waveguide amplifiers and lasers. Si-technology compatible low-loss Al2O3 channel waveguides grown on thermally oxidized silicon substrates have been reported recently. We used FIB milling for reflection grating definition on Al2O3 channel and ridge waveguides. Str...
متن کاملNano-Scale Lateral Milling with Focused Ion Beam for Ultra-Smooth Optical Device Surface
The effect of the nano-scale lateral milling process using a focused ion beam (FIB) was studied in order to prepare a flat and smooth surface suitable for the growth of optical device structures such as a distributed Bragg reflector (DBR) mirror on a rough gallium nitride (GaN) surface. A high-quality, smooth, and flat surface is very essential for high precision space optics. It was fabricated...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Beilstein Journal of Nanotechnology
سال: 2012
ISSN: 2190-4286
DOI: 10.3762/bjnano.3.67